| Accuracy of Flow Measurements: |
+/- 0.5% |
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| Repeatability of Flow Control: |
+/- 0.1% |
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| Linearity of Flow Measurements: |
+/- 0.5% |
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| MFC Range for Dilution Air: |
0 – 10 SLPM standard - other ranges available |
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| MFC Range for Dilution Gases: |
0 – 100 SCPM standard - other ranges available |
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Ozone Generator Specifications:
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| Ozone Output Range: |
0 to 1000 PPB at 5 SLPM zero air flow, software selectable |
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| Minimum Non-zero Ozone: |
1 PPB |
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| Ozone Output Resolution: |
0.5 PPB |
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| Ozone Output Linearity: |
+/- 1% of range |
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| Nominal Ozone Flow: |
100 SCCM |
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| UV Lamp Temperature: |
50 +/- 0.1°C |
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| Digital I/O Specifications |
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| Status input voltage range: |
up to 35V, TTL, or contact closure |
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| Control output maximum voltage: |
35VDC |
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| Control output maximum current: |
500mA with all outputs activated; 1.2A with only one |
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Module Specifications:
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| Power |
Standard: |
+5, +/-15V & +24V at less than 80 Watts
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| 12V Option: |
9-16V at less than 7 Amps |
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| Dimensions: |
7” wide x 4.9” high x 19.5” long (178 x 124.5 x 495 mm) |
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| Weight: |
9 lb (4 kg)
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